Ceramic Slot Boat for Wafer Carrier
- Brand Name
- 3X Ceramic Parts
- Material Type
- zirconia ceramic
- Forming Way
- isostatic pressing
- MOQ
- 1 piece
- Specification
- custom make
- Density
- 6.0 g /cm3
- Application
- semiconductor
- Main Property
- slip free
- Machining Way
- machining
- Compressive Strength
- 2000 Mpa
- Delivery Time
- 25 days around
- Shipping Way
- by express
- HS CODE
- 8547100000
Slip Free Ceramic Slot Boat for Wafer Carrier
The slip free ceramic slot boat vertical carriers or boats for holding semiconductor wafers during heat processing and is particularly concerned with a vertical carrier designed to effectively support large semiconductor wafers having nominal diameters equal to or greater than about 200 millimeters, preferably wafers having nominal diameters of about 300 millimeters or greater.
Semiconductor wafers, especially those made of silicon, may be conventionally processed by placing them horizontally into a holding device or carrier at intervals in the vertical direction and exposing the wafer's surfaces to high temperature gases in a furnace, usually to form an oxide film on these surfaces or to deposit certain atoms therein. To maximize the amount of surface area exposed to the heat treatment, the wafers are usually held in “boats” or carriers typically comprised of parallel vertical supports or rails having relatively short slots evenly spaced along their length. The slots in one support are normally aligned with slots in the other support so a wafer can be jointly received by a corresponding slot in each support. By placing wafers in appropriate slots on the supports, the boat can carry a stack of wafers separated from each other so that both sides of the wafer are exposed to the heat treatment.
