Zirconia Ceramic Long Tooth Rails for Wafer Handling
- Brand Name
- 3X Ceramic Parts
- Material Type
- zirconia ceramic
- Forming Way
- isostatic pressing
- MOQ
- 1 piece
- Specification
- custom make
- Density
- 6.0g/cm3
- Thermal Conductivity
- 2.5 W/ (m.k)
- Thermal Shock Resistant
- 250 △ T° C
- Compressive Strength
- 2000 Mpa
- Flexural Strength
- 800 Mpa
- Tolerance
- 0.001mm
- HS CODE
- 8547100000
Zirconia Ceramic Long Tooth Rails for Wafer Handling
Zirconia Ceramic long tooth rails could also called as ceramic comb , ceramic gripper . It is made of zirconia ceramic material because this type of ceramic material are high temperature resistant , corrossion resistant and very wearable. It is also very easy to clean and wash because of its smooth and density surface . The zirconia ceramic tooth rails adopt special processing technology which greatly reduce the marks on the wafers . It is assembled on the automatic wafer handling system for DOA equipment .
The automatic wafer handling system DOA equipment integrated wafer loading & unloading, unloading the wafers from the Ceramic boat to the cassette or loading the wafers from the cassette to the ceramic boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production or be used only for wafer loading or unloading is also available.
The parameters of zirconia ceramic long tooth rails for wafer handling :
| Model | Value |
| Wafer Size (mm) | 210mm |
| Breakage Rate | ≤0.03% |
| Footprint | custom make |
| Ceramic Boat Dimension | 1200 pieces / boat , pitch 3.15 |
| Capability | 1000000 pieces / month |
| Loading Method | Square shape wafer loading |
| Power Consumption | 13KW |
| Machining Way | flapping , grinding |
